Description
Series AZ is an ultra high purity (UHP) regulator for gas delivery in
semiconductor and other clean industries. The series is available in low to
high flow capacities, with some models offering a tied-diaphragm design.
Available options include Hastelloy® internals for corrosion resistance,
and a tube stub weld fitting connection.
– For UHP gas delivery
– Flow capacity to 1000 slpm
– Body material: 316L SS
– Inlet pressure: max. 300 psig (2.1 MPa)
Download AZ1300 Datasheet by click the link Datasheet.
