Series AP is an ultra high purity (UHP) regulator for gas delivery in
semiconductor and other clean industries. The series is available in low
to high flow capacities, with some models offering a tied-diaphragm design.
Available options include Hastelloy® internals for corrosion resistance, a
tube stub weld fitting connection type, and various surface finishes.
– For UHP gas delivery
– High inlet pressure type: standard Max. 1700 psig (11.7MPa); HR
(option) Max. 3000 psig (20.7 MPa)
– Flow capacity: standard to 800 slpm; HF (option) to 1000 slpm; FC
(option) to 1500 slpm
– Body material: 316L SS secondary remelt
– Hastelloy internals available for corrosion resistence
– Tied-diaphragm design
– Point of use and source cylinder applications
Download AP1200 Datasheet by click the link Datasheet.
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