Series AZ is an ultra high purity (UHP) regulator for gas delivery in
semiconductor and other clean industries. The series is available in low to
high flow capacities, with some models offering a tied-diaphragm design.
Available options include Hastelloy® internals for corrosion resistance,
and a tube stub weld fitting connection.
– For UHP gas delivery
– High inlet pressure type: standard max. 2300 psig (15.9MPa); HR
(option): max: 3000 psig (20.7MPa)
– Body material: 316L SS
– Hastelloy® internals standard
– Tied-diaphragm design
– Sub-atmospheric pressure delivery option
Download AZ1400T Datasheet by click the link Datasheet.
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