SL5400 Single Stage Regulator for Ultra High Purity Intermediate Flow

Series SL is an ultra high purity (UHP) regulator for gas delivery in
semiconductor and other clean industries. The series has a springless
design (no poppet spring in the wetted area), and is available in low
to intermediate flow capacities. Available options include Hastelloy® internals
for corrosion resistance, a tube weld fitting connection type, and various
surface finishes.

– For UHP gas delivery
– Body material: 316L SS secondary remelt
– Hastelloy® internals available for corrosion resistance
– Springless design (no poppet spring in the wetted area)
– Intermediate flow

Download SL5400 Datasheet by click the link Datasheet.