XLS High Vacuum Angle Valve Electromagnetic Type Bellows Balance

High vacuum angle valve series XL provides excellent thermal conductivity
results in a uniform temperature for the entire valve body and a marked
decrease in the condensation of gases inside the valve. The valve does not
contain heavy metals such as Ni (nickel) or Cr (chrome) and a low
sputtering yield also helps to minimize heavy metal contamination of
semiconductor wafers.

– Particulates are reduced because there are no sliding metal parts
– Pressure balance mechanism allows unrestricted exhaust direction
– Can be used in portable equipment since air for drive is not required
– A control power supply circuit for solenoid valve drive has been made
standard

Download XLS Datasheet by click the link Datasheet.