XGTx High Vacuum Slit Valve

SMC High Vacuum Slit Valve

Condition: New, Original or Alternate.

Sharing good things


Series XGT slit valve is suitable for the partition valve between the load
lock chamber and the transfer chamber, and between the transfer chamber and
the process chamber in semiconductor manufacturing equipment, etc.

– Long service life: 3 million cycles (within standard temperture range)
– Low particle generation: reduced by 1/5 or more (compared with the
current product)
– Easier maintenance
– Easy replacement of bellows
– Gate can be replaced from above (Made to order)
– Safety measures
– A mechanical end lock mechanism has been adopted

Download XGTx Datasheet by click the link Datasheet.

Do you like this item?

Drop us a line by compiling the form below. We will be more than happy to reply to any of your inquiry!