SMC High Vacuum Equipment
Vacuum chambers are generally used in the semiconductor manufacturing process. The peripheral equipment used to exhaust air from the supply atmospheric pressure to the vacuum chamber such as valves, pressure switches, cylinders and gate valves should meet conditions such as non-leakage, clean specifications and corrosion resistance. SMC’s high vacuum products meet those demands.
Showing 1–12 of 16 results
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XSA NC Type Straight Solenoid Valve
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XVD2 High Vacuum Valve Smooth Vent
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XGTx High Vacuum Slit Valve
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XM and XY High Vacuum Valves Stainless Steel Angle and In-line Types
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XLJ Vacuum Angle Valve w Release Valve
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XLxQ High Vacuum Angle Valve Aluminum One-touch Connection amp Release
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XLC Aluminum High Vacuum Angle Valve Double Acting Bellows Seal
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XLH High Vacuum Manual Angle Valve Bellows Seal
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XLS High Vacuum Angle Valve Electromagnetic Type Bellows Balance
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XLFV Aluminum High Vacuum Angle Valve Normally Closed O-ring Seal with Solenoid Valve
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XLF Aluminum High Vacuum Angle Valve Normally Closed O-ring Seal
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XLDV Aluminum High Vacuum Angle Valves Air Operated w Solenoid Valve
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