Description
High vacuum angle valve series XL provides excellent thermal conductivity
results in a uniform temperature for the entire valve body and a marked
decrease in the condensation of gases inside the valve. The valve does not
contain heavy metals such as Ni (nickel) or Cr (chrome) and a low
sputtering yield also helps to minimize heavy metal contamination of
semiconductor wafers.
– Excellent thermal conductivity offers uniform temperature and
decreased gas condensation inside valve
– High corrosion resistance to fluorine gas
– Minimal outgassing
– Minimal contamination from heavy metals
– Optional heaters
– Optional position sensors
– Optional oxalic acid anodizing for internals
Download XLFV Datasheet by click the link Datasheet.
