Description
High vacuum angle valve series XL provides excellent thermal conductivity
results in a uniform temperature for the entire valve body and a marked
decrease in the condensation of gases inside the valve. The valve does not
contain heavy metals such as Ni (nickel) or Cr (chrome) and a low
sputtering yield also helps to minimize heavy metal contamination of
semiconductor wafers.
– High vacuum angle valve
– Type: manual, bellows seal
– Flange size: 16 ~ 50
– Heater type: H1 (80°C), H2 (100°C), H3 (120°C)
– Auto switches not available
Download XLH Datasheet by click the link Datasheet.
