Description
The 13/22-MXQ, clean room precision slide table uses a specially treated
Martensitic stainless steel for its table and guide block to isolate the
load bearing from the movement of the dual rods and pison seals to reduce
particle generation. A relief plate was added to the body to house relief
bushings and a vacuum port to vacuum particles equally on both sides of the
piston rods to prevent particle leakage. Silicon rubber dust covers and
plugs have also been attached to the floating parts to prevent particles
from leaking.
– Bore sizes: 6, 8, 12, 16, 20, 25 mm
– Repeatable positioning accuracy: +/-0.05mm
– Stroke adjuster options: rubber or metal stopper
– PTFE grease used in Clean Room Series
– Lithium grease used in Copper, Fluorine, Silicone-free Series
– RoHS compliant
– Auto switch capable
Download 13-22-MXQ Datasheet by click the link Datasheet.
