Description
Series XLA-2 are high vacuum angle valves for use in industrial
applications employing high vacuum and process gases. Common industries
that may use these angle valves include semiconductor, solar and other
electronics production, as well as food and pharmaceutical manufacturing.
XLA-2 valves are single-acting, normally closed, with a bellows seal over
the shaft and spring. The vavle opens when pressure is applied at the
pilot port. The bellows assembly can be replaced, reducing maintenance
costs and waste materials. The valve body is hard anodized A6063 aluminum,
with 304 stainless steel valves and bellows. Numerous seal materials are
available for a wide range of chmical compatibility.
– Excellent thermal conductivity offers uniform temperature and
decreased gas condensation inside valve
– High corrosion resistance to fluorine gas
– Minimal outgassing
– Minimal contamination from heavy metals
– Optional heaters
– Optional position sensors
– Optional oxalic acid anodizing for internals
Download XLA Datasheet by click the link Datasheet.
