Description
Series AP is an ultra high purity (UHP) regulator for gas delivery in
semiconductor and other clean industries. The series is available in low
to high flow capacities, with some models offering a tied-diaphragm design.
Available options include Hastelloy® internals for corrosion resistance, a
tube stub weld fitting connection type, and various surface finishes.
– For UHP gas delivery
– Flow capacity: standard to 15 slpm; HF (option) to 30 slpm
– Body material: 316L SS secondary remelt
– Hastelloy® internals available for corrosion resistance
– Sub-atmospheric pressure delivery option
Download AP500 Datasheet by click the link Datasheet.
