Series AZ is an ultra high purity (UHP) regulator for gas delivery in
semiconductor and other clean industries. The series is available in low to
high flow capacities, with some models offering a tied-diaphragm design.
Available options include Hastelloy® internals for corrosion resistance,
and a tube stub weld fitting connection.
– For UHP gas delivery
– Sub-atmospheric to low positive pressure delivery
– Body material: 316L SS
– Hastelloy® internals available for corrosion resistance
– Flow capacity to 0.5 slpm
Download AZ1100 Datasheet by click the link Datasheet.