Description
Series AP is an ultra high purity (UHP) regulator for gas delivery in
semiconductor and other clean industries. The series is available in low
to high flow capacities, with some models offering a tied-diaphragm design.
Available options include Hastelloy® internals for corrosion resistance, a
tube stub weld fitting connection type, and various surface finishes.
– For UHP gas delivery
– Flow capacity: AP9000 to 2000 slpm; AP9100 to 5000 slpm
– Body material: 316L SS
– Tied-diaphragm design
– Bulk gas delivery
Download AP9x00 Datasheet by click the link Datasheet.
